Wafer Manufacture Process Flow
The value chain of semiconductor Process
Introduction to IC Manufacturing processes
◎ Design House
◎ Wafer Fabrication
◎ photo-development techniuqe
◎ micro-photo etching technique
◎ RTP
◎ CVD
◎ Low Pressure CVD (LPCVD) Principle
◎ Plasma-Enhanced CVD
◎ CVD Process
◎ Ion Implant
◎ etching
◎ CMP
◎ processes monitoring
